| Part No. | Description | Maker | Warranty | Lead time | Image |
| SERV.502.27813 | Library MK2 Module (F-body) | ASML 300mm | 6 months | 4~5 weeks |  |
| SERV.502.30195 | Library MK4 Module (G-body) | ASML 300mm | 6 months | 4~5 weeks |  |
| SERV.502.30025 | IRIS PPD MK2 Module (F-body) | ASML 300mm | 6 months | 6~8 weeks |  |
| SERV.502.30027 | IRIS PPD XT Module (G-body) | ASML 300mm | 6 months | 6~8 weeks |  |
| 4022.631.15483 | Chuck Clamp Unit(CCM) | ASML 300mm | 6 months | 4~5 weeks |  |
| SERV.635.08751 | Chuck Parking Lock (CPL) | ASML 300mm | 6 months | 4~5 weeks |  |
| SERV. 502.28823 4022.456.2897.1 | Gripper Comp | ASML 200mm | 6 months | 4~5 weeks |  |
| SERV.502.27466 | DI-POD | ASML 200mm | 6 months | 4~5 weeks |  |
| SERV.502.29758 | REMA A-type | ASML 200mm | 6 months | 4~6 weeks | |
| SERV.502.28963 | REMA B-type | ASML 200mm | 6 months | 4~6 weeks |  |
| 4022.453.0183.2 | R-PIN | ASML 200mm | 6 months | 4~5 weeks |  |
| SERV.502.28211 | P-Unit | ASML 200mm | 6 months | 4~5 weeks |  |
| 9700-6444-02 | Index Unit | CANON 300mm | 6 months | 4~5 weeks |  |
| Y60-2543-000-000 | Masking Blade Unit | CANON 300mm | 6 months | 4~6 weeks |  |
| 4B991-266-2AN | Load Slider Type4 | NIKON 200mm | 6 months | 6~8 weeks |  |
| 4S604-088 | Load Slider Type3 | NIKON 200mm | 6 months | 6~8 weeks |
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